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Inventor
CHO DU-HYUN
KR
2 patents
Patents
2 patents
US8017485B2
Sep 13, 2011
Methods of fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD
4 citations
60
US8003487B2
Aug 23, 2011
Methods of manufacturing a semiconductor device using a layer suspended across a trench
SAMSUNG ELECTRONICS CO LTD
4 citations
58