Inventor
BUSCHBECK WOLFGANG
DE11 patents
⚠️ This page may combine multiple inventors who share the name “BUSCHBECK WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS10636687B2Apr 28, 2020
Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber
APPLIED MATERIALS INC9 citations83
US12060634B2Aug 13, 2024
Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller
APPLIED MATERIALS INC0 citations61
US12286703B2Apr 29, 2025
Evaporation apparatus, vapor deposition apparatus, and evaporation method
APPLIED MATERIALS INC0 citations51
US11905589B2Feb 20, 2024
Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate
APPLIED MATERIALS INC0 citations50
US9873945B2Jan 23, 2018
Common deposition platform, processing station, and method of operation thereof
APPLIED MATERIALS INC1 citations49
US8869967B2Oct 28, 2014
Dynamic load lock with cellular structure for discrete substrates
APPLIED MATERIALS INC0 citations47
LEYBOLD AG
3 patentsUS5216742AJun 1, 1993
Linear thermal evaporator for vacuum vapor depositing apparatus
LEYBOLD AG28 citations92
US6004109ADec 21, 1999
Apparatus for the rapid evacuation of a vacuum chamber
LEYBOLD AG43 citations91
US5228838AJul 20, 1993
Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
LEYBOLD AG48 citations91