Inventor
REGELMAN OLGA
US10 patents
⚠️ This page may combine multiple inventors who share the name “REGELMAN OLGA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS10312056B2Jun 4, 2019
Distributed electrode array for plasma processing
APPLIED MATERIALS INC39 citations98
US7196283B2Mar 27, 2007
Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface
APPLIED MATERIALS INC118 citations97
US10418225B2Sep 17, 2019
Distributed electrode array for plasma processing
APPLIED MATERIALS INC4 citations84
US7777599B2Aug 17, 2010
Methods and apparatus for controlling characteristics of a plasma
APPLIED MATERIALS INC12 citations84
US10373807B2Aug 6, 2019
Distributed electrode array for plasma processing
APPLIED MATERIALS INC1 citations73
US9799491B2Oct 24, 2017
Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching
APPLIED MATERIALS INC2 citations73
US10615004B2Apr 7, 2020
Distributed electrode array for plasma processing
APPLIED MATERIALS INC0 citations52
US9570275B2Feb 14, 2017
Heated showerhead assembly
APPLIED MATERIALS INC0 citations52
US9196462B2Nov 24, 2015
Showerhead insulator and etch chamber liner
APPLIED MATERIALS INC1 citations51