Inventor
BUCHBERGER DOUGLAS A
US7 patents
⚠️ This page may combine multiple inventors who share the name “BUCHBERGER DOUGLAS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7674353B2Mar 9, 2010
Apparatus to confine plasma and to enhance flow conductance
APPLIED MATERIALS INC8 citations83
US10096466B2Oct 9, 2018
Pulsed plasma for film deposition
APPLIED MATERIALS INC4 citations73
US7618516B2Nov 17, 2009
Method and apparatus to confine plasma and to enhance flow conductance
APPLIED MATERIALS INC6 citations73
US10096494B2Oct 9, 2018
Substrate support with symmetrical feed structure
APPLIED MATERIALS INC0 citations51
US9214315B2Dec 15, 2015
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
APPLIED MATERIALS INC0 citations50