Inventor
HOCKEY MARY ANN
US4 patents
Patents
4 patentsUS9249013B2Feb 2, 2016
Silicon hardmask layer for directed self-assembly
BREWER SCIENCE INC10 citations81
US9123541B2Sep 1, 2015
Highly etch-resistant polymer block for use in block copolymers for directed self-assembly
BREWER SCIENCE INC9 citations80
US10421878B2Sep 24, 2019
High-Chi block copolymers for directed self-assembly
BREWER SCIENCE INC1 citations55
US10961383B2Mar 30, 2021
Gradient block copolymers for directed self-assembly
BREWER SCIENCE INC0 citations40