Inventor

GUERRERO DOUGLAS

US2 patents

Patents

2 patents

US8968989B2Mar 3, 2015

Assist layers for EUV lithography

BREWER SCIENCE INC297 citations93

US9123541B2Sep 1, 2015

Highly etch-resistant polymer block for use in block copolymers for directed self-assembly

BREWER SCIENCE INC9 citations80