Inventor

QULI FARHAT

US6 patents

⚠️ This page may combine multiple inventors who share the name “QULI FARHAT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUN MEI

2 patents

US9222842B2Dec 29, 2015

High temperature sensor wafer for in-situ measurements in active plasma

SUN MEI9 citations79

US9134186B2Sep 15, 2015

Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces

SUN MEI2 citations58

NGUYEN ANDREW

1 patent

US10720350B2Jul 21, 2020

Etch-resistant coating on sensor wafers for in-situ measurement

NGUYEN ANDREW6 citations71

JENSEN EARL

1 patent

US9360302B2Jun 7, 2016

Film thickness monitor

JENSEN EARL3 citations71

KLA TENCOR CORP

1 patent

US9719867B2Aug 1, 2017

Method and system for measuring heat flux

KLA TENCOR CORP5 citations69

KLA CORP

1 patent

US11385187B1Jul 12, 2022

Method of fabricating particle size standards on substrates

KLA CORP0 citations56