Inventor

SHARRATT STEPHEN

US2 patents

⚠️ This page may combine multiple inventors who share the name “SHARRATT STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUN MEI

1 patent

US9222842B2Dec 29, 2015

High temperature sensor wafer for in-situ measurements in active plasma

SUN MEI9 citations79

KLA TENCOR CORP

1 patent

US9719867B2Aug 1, 2017

Method and system for measuring heat flux

KLA TENCOR CORP5 citations69