Inventor
COMITA PAUL B
US28 patents
⚠️ This page may combine multiple inventors who share the name “COMITA PAUL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS6833322B2Dec 21, 2004
Apparatuses and methods for depositing an oxide film
APPLIED MATERIALS INC72 citations97
US6494959B1Dec 17, 2002
Process and apparatus for cleaning a silicon surface
APPLIED MATERIALS INC260 citations97
US6455814B1Sep 24, 2002
Backside heating chamber for emissivity independent thermal processes
APPLIED MATERIALS INC51 citations96
US6042654AMar 28, 2000
Method of cleaning CVD cold-wall chamber and exhaust lines
APPLIED MATERIALS INC134 citations95
US6153260ANov 28, 2000
Method for heating exhaust gas in a substrate reactor
APPLIED MATERIALS INC45 citations94
US7645339B2Jan 12, 2010
Silicon-containing layer deposition with silicon compounds
APPLIED MATERIALS INC14 citations92
US7540920B2Jun 2, 2009
Silicon-containing layer deposition with silicon compounds
APPLIED MATERIALS INC31 citations92
US5924058AJul 13, 1999
Permanently mounted reference sample for a substrate measurement tool
APPLIED MATERIALS INC27 citations92
US6368567B2Apr 9, 2002
Point-of-use exhaust by-product reactor
APPLIED MATERIALS INC19 citations91
US6366861B1Apr 2, 2002
Method of determining a wafer characteristic using a film thickness monitor
APPLIED MATERIALS INC49 citations91
US6277194B1Aug 21, 2001
Method for in-situ cleaning of surfaces in a substrate processing chamber
APPLIED MATERIALS INC66 citations91
US6254686B1Jul 3, 2001
Vented lower liner for heating exhaust gas from a single substrate reactor
APPLIED MATERIALS INC28 citations90
US5914050AJun 22, 1999
Purged lower liner
APPLIED MATERIALS INC46 citations90
US7758697B2Jul 20, 2010
Silicon-containing layer deposition with silicon compounds
APPLIED MATERIALS INC10 citations84
US6774040B2Aug 10, 2004
Apparatus and method for surface finishing a silicon film
APPLIED MATERIALS INC16 citations79
US6376387B2Apr 23, 2002
Method of sealing an epitaxial silicon layer on a substrate
APPLIED MATERIALS INC13 citations74
US6876442B2Apr 5, 2005
Method of calibrating and using a semiconductor processing system
APPLIED MATERIALS INC10 citations71
US6685779B2Feb 3, 2004
Method and a system for sealing an epitaxial silicon layer on a substrate
APPLIED MATERIALS INC5 citations63
IBM
5 patentsUS4880959ANov 14, 1989
Process for interconnecting thin-film electrical circuits
IBM38 citations92
US5525392AJun 11, 1996
Magnetic recording medium having a fluorinated polymeric protective layer formed by an ion beam
IBM27 citations91
US5510164AApr 23, 1996
Single-sided ablative worm optical disk with multilayer protective coating
IBM40 citations91
US5407710AApr 18, 1995
Laser interconnection of circuits on transparent substrate
IBM20 citations91
US5246745ASep 21, 1993
Laser-induced chemical vapor deposition of thin-film conductors
IBM32 citations90
BLUESHIFT BIOTECHNOLOGIES INC
5 patentsUS7576862B2Aug 18, 2009
Measuring time dependent fluorescence
BLUESHIFT BIOTECHNOLOGIES INC21 citations89
US7141378B2Nov 28, 2006
Exploring fluorophore microenvironments
BLUESHIFT BIOTECHNOLOGIES INC18 citations83
US7674588B2Mar 9, 2010
Screening using polarization anisotropy in FRET emissions
BLUESHIFT BIOTECHNOLOGIES INC3 citations61
US7812956B2Oct 12, 2010
Time dependent fluorescence measurements
BLUESHIFT BIOTECHNOLOGIES INC5 citations60
US7643146B2Jan 5, 2010
Methods and apparatus for reducing noise in scatterometry measurements
BLUESHIFT BIOTECHNOLOGIES INC0 citations39