P

Inventor

COMITA PAUL B

US28 patents
⚠️ This page may combine multiple inventors who share the name “COMITA PAUL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

18 patents
US6833322B2Dec 21, 2004

Apparatuses and methods for depositing an oxide film

APPLIED MATERIALS INC72 citations97
US6494959B1Dec 17, 2002

Process and apparatus for cleaning a silicon surface

APPLIED MATERIALS INC260 citations97
US6455814B1Sep 24, 2002

Backside heating chamber for emissivity independent thermal processes

APPLIED MATERIALS INC51 citations96
US6042654AMar 28, 2000

Method of cleaning CVD cold-wall chamber and exhaust lines

APPLIED MATERIALS INC134 citations95
US6153260ANov 28, 2000

Method for heating exhaust gas in a substrate reactor

APPLIED MATERIALS INC45 citations94
US7645339B2Jan 12, 2010

Silicon-containing layer deposition with silicon compounds

APPLIED MATERIALS INC14 citations92
US7540920B2Jun 2, 2009

Silicon-containing layer deposition with silicon compounds

APPLIED MATERIALS INC31 citations92
US5924058AJul 13, 1999

Permanently mounted reference sample for a substrate measurement tool

APPLIED MATERIALS INC27 citations92
US6368567B2Apr 9, 2002

Point-of-use exhaust by-product reactor

APPLIED MATERIALS INC19 citations91
US6366861B1Apr 2, 2002

Method of determining a wafer characteristic using a film thickness monitor

APPLIED MATERIALS INC49 citations91
US6277194B1Aug 21, 2001

Method for in-situ cleaning of surfaces in a substrate processing chamber

APPLIED MATERIALS INC66 citations91
US6254686B1Jul 3, 2001

Vented lower liner for heating exhaust gas from a single substrate reactor

APPLIED MATERIALS INC28 citations90
US5914050AJun 22, 1999

Purged lower liner

APPLIED MATERIALS INC46 citations90
US7758697B2Jul 20, 2010

Silicon-containing layer deposition with silicon compounds

APPLIED MATERIALS INC10 citations84
US6774040B2Aug 10, 2004

Apparatus and method for surface finishing a silicon film

APPLIED MATERIALS INC16 citations79
US6376387B2Apr 23, 2002

Method of sealing an epitaxial silicon layer on a substrate

APPLIED MATERIALS INC13 citations74
US6876442B2Apr 5, 2005

Method of calibrating and using a semiconductor processing system

APPLIED MATERIALS INC10 citations71
US6685779B2Feb 3, 2004

Method and a system for sealing an epitaxial silicon layer on a substrate

APPLIED MATERIALS INC5 citations63

IBM

5 patents

BLUESHIFT BIOTECHNOLOGIES INC

5 patents