Inventor
LANKARD SR JOHN R
US4 patents
Patents
4 patentsUS4508749AApr 2, 1985
Patterning of polyimide films with ultraviolet light
IBM154 citations94
US5246745ASep 21, 1993
Laser-induced chemical vapor deposition of thin-film conductors
IBM32 citations90
US5441836AAug 15, 1995
Laser ablation mask repair method
IBM14 citations72
US5370974ADec 6, 1994
Laser exposure of photosensitive polyimide for pattern formation
IBM11 citations68