Inventor
YI XU
CN22 patents
⚠️ This page may combine multiple inventors who share the name “YI XU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
10 patentsUS6232217B1May 15, 2001
Post treatment of via opening by N-containing plasma or H-containing plasma for elimination of fluorine species in the FSG near the surfaces of the via opening
CHARTERED SEMICONDUCTOR MFG81 citations94
US6340608B1Jan 22, 2002
Method of fabricating copper metal bumps for flip-chip or chip-on-board IC bonding on terminating copper pads
CHARTERED SEMICONDUCTOR MFG21 citations92
US6261942B1Jul 17, 2001
Dual metal-oxide layer as air bridge
CHARTERED SEMICONDUCTOR MFG42 citations92
US6540841B1Apr 1, 2003
Method and apparatus for removing contaminants from the perimeter of a semiconductor substrate
CHARTERED SEMICONDUCTOR MFG13 citations84
US6375857B1Apr 23, 2002
Method to form fuse using polymeric films
CHARTERED SEMICONDUCTOR MFG12 citations74
US6365508B1Apr 2, 2002
Process without post-etch cleaning-converting polymer and by-products into an inert layer
CHARTERED SEMICONDUCTOR MFG11 citations74
US6730591B2May 4, 2004
Method of using silicon rich carbide as a barrier material for fluorinated materials
CHARTERED SEMICONDUCTOR MFG6 citations71
US6429129B1Aug 6, 2002
Method of using silicon rich carbide as a barrier material for fluorinated materials
CHARTERED SEMICONDUCTOR MFG11 citations71
US6813796B2Nov 9, 2004
Apparatus and methods to clean copper contamination on wafer edge
CHARTERED SEMICONDUCTOR MFG4 citations63
US6358821B1Mar 19, 2002
Method of copper transport prevention by a sputtered gettering layer on backside of wafer
CHARTERED SEMICONDUCTOR MFG5 citations63
HEPTAGON MICRO OPTICS PTE LTD
6 patentsUS9094593B2Jul 28, 2015
Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules
HEPTAGON MICRO OPTICS PTE LTD7 citations82
US10186540B2Jan 22, 2019
Optoelectronic modules that have shielding to reduce light leakage or stray light
HEPTAGON MICRO OPTICS PTE LTD2 citations71
US9543354B2Jan 10, 2017
Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules
HEPTAGON MICRO OPTICS PTE LTD3 citations71
US10243111B2Mar 26, 2019
Optoelectronic device subassemblies and methods of manufacturing the same
HEPTAGON MICRO OPTICS PTE LTD4 citations70
US10199426B2Feb 5, 2019
Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules
HEPTAGON MICRO OPTICS PTE LTD0 citations50
US9859327B2Jan 2, 2018
Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules
HEPTAGON MICRO OPTICS PTE LTD0 citations50