Inventor
TANEICHI DAIKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TANEICHI DAIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUI CHEMICALS INC
9 patentsUS10216081B2Feb 26, 2019
Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device
MITSUI CHEMICALS INC2 citations72
US10585348B2Mar 10, 2020
Pellicle, pellicle production method and exposure method using pellicle
MITSUI CHEMICALS INC2 citations71
US11852968B2Dec 26, 2023
Pellicle, exposure master, exposure device and method for manufacturing semiconductor device
MITSUI CHEMICALS INC0 citations60
US11137677B2Oct 5, 2021
Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method
MITSUI CHEMICALS INC0 citations60
US7977429B2Jul 12, 2011
Polymers and uses thereof
MITSUI CHEMICALS INC3 citations58
US10895805B2Jan 19, 2021
Pellicle manufacturing method and method for manufacturing photomask with pellicle
MITSUI CHEMICALS INC0 citations50
US10606169B2Mar 31, 2020
Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle
MITSUI CHEMICALS INC0 citations49
US12344773B2Jul 1, 2025
Mask adhesive and pellicle comprising same
MITSUI CHEMICALS INC0 citations48
US10488751B2Nov 26, 2019
Pellicle, production method thereof, exposure method
MITSUI CHEMICALS INC0 citations40