Inventor
ONO YOSUKE
JP19 patents
⚠️ This page may combine multiple inventors who share the name “ONO YOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUI CHEMICALS INC
15 patentsUS9703187B2Jul 11, 2017
Pellicle and EUV exposure device comprising same
MITSUI CHEMICALS INC11 citations83
US10216081B2Feb 26, 2019
Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device
MITSUI CHEMICALS INC2 citations72
US10108084B2Oct 23, 2018
Pellicle membrane, pellicle, original plate for exposure, exposure apparatus, and method of producing semiconductor device
MITSUI CHEMICALS INC4 citations72
US11042085B2Jun 22, 2021
Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device
MITSUI CHEMICALS INC4 citations71
US10585348B2Mar 10, 2020
Pellicle, pellicle production method and exposure method using pellicle
MITSUI CHEMICALS INC2 citations71
US11204547B2Dec 21, 2021
Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle
MITSUI CHEMICALS INC1 citations62
US11852968B2Dec 26, 2023
Pellicle, exposure master, exposure device and method for manufacturing semiconductor device
MITSUI CHEMICALS INC0 citations60
US11137677B2Oct 5, 2021
Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method
MITSUI CHEMICALS INC0 citations60
US11243463B2Feb 8, 2022
Supporting frame for pellicle, pellicle, method for manufacturing same, exposure master using same, and method for manufacturing semiconductor device
MITSUI CHEMICALS INC0 citations52
US12386252B2Aug 12, 2025
Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film
MITSUI CHEMICALS INC0 citations50
US10895805B2Jan 19, 2021
Pellicle manufacturing method and method for manufacturing photomask with pellicle
MITSUI CHEMICALS INC0 citations50
US10606169B2Mar 31, 2020
Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle
MITSUI CHEMICALS INC0 citations49
US10106660B2Oct 23, 2018
Film containing a resin having a thiourethane bond and uses thereof
MITSUI CHEMICALS INC0 citations49
US10261411B2Apr 16, 2019
Pellicle film, pellicle frame, pellicle, and method for producing same
MITSUI CHEMICALS INC0 citations48
US10488751B2Nov 26, 2019
Pellicle, production method thereof, exposure method
MITSUI CHEMICALS INC0 citations40