Inventor
BIYAJIMA Tsuneaki
JP8 patents
Patents
8 patentsUS10585348B2Mar 10, 2020
Pellicle, pellicle production method and exposure method using pellicle
MITSUI CHEMICALS INC2 citations71
US11852968B2Dec 26, 2023
Pellicle, exposure master, exposure device and method for manufacturing semiconductor device
MITSUI CHEMICALS INC0 citations60
US11137677B2Oct 5, 2021
Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method
MITSUI CHEMICALS INC0 citations60
US10895805B2Jan 19, 2021
Pellicle manufacturing method and method for manufacturing photomask with pellicle
MITSUI CHEMICALS INC0 citations50
US10606169B2Mar 31, 2020
Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle
MITSUI CHEMICALS INC0 citations49
US12344773B2Jul 1, 2025
Mask adhesive and pellicle comprising same
MITSUI CHEMICALS INC0 citations48
US10261411B2Apr 16, 2019
Pellicle film, pellicle frame, pellicle, and method for producing same
MITSUI CHEMICALS INC0 citations48
US10488751B2Nov 26, 2019
Pellicle, production method thereof, exposure method
MITSUI CHEMICALS INC0 citations40