Inventor
PENG CHIH-HSIUNG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “PENG CHIH-HSIUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9946827B2Apr 17, 2018
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations91
US11010526B2May 18, 2021
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12412016B2Sep 9, 2025
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11748540B2Sep 5, 2023
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10521541B2Dec 31, 2019
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51