Inventor
LI XUESONG
US23 patents
⚠️ This page may combine multiple inventors who share the name “LI XUESONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS9324635B2Apr 26, 2016
Semiconductor interconnect structure having a graphene-based barrier metal layer
IBM6 citations82
US10704140B2Jul 7, 2020
Substrate holder for graphene film synthesis, and uses thereof
IBM0 citations51
US10584425B2Mar 10, 2020
Electrochemical etching apparatus
IBM0 citations51
US9994968B2Jun 12, 2018
Electrochemical etching apparatus
IBM1 citations51
US9738987B2Aug 22, 2017
Electrochemical etching apparatus
IBM1 citations51