Inventor
FU YUEHONG
US7 patents
⚠️ This page may combine multiple inventors who share the name “FU YUEHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS10262887B2Apr 16, 2019
Pin lifter assembly with small gap
LAM RES CORP15 citations84
US10910195B2Feb 2, 2021
Substrate support with improved process uniformity
LAM RES CORP3 citations72
US10741425B2Aug 11, 2020
Helium plug design to reduce arcing
LAM RES CORP4 citations72
US11984296B2May 14, 2024
Substrate support with improved process uniformity
LAM RES CORP0 citations61
US10460978B2Oct 29, 2019
Boltless substrate support assembly
LAM RES CORP0 citations51