Inventor
NISHI MITSUO
JP11 patents
Patents
11 patentsUS5301700AApr 12, 1994
Washing system
TOKYO ELECTRON LTD132 citations97
US5620295AApr 15, 1997
Transfer apparatus
TOKYO ELECTRON LTD60 citations95
US5370142ADec 6, 1994
Substrate washing device
TOKYO ELECTRON LTD99 citations95
US5374153ADec 20, 1994
Transfer apparatus
TOKYO ELECTRON LTD28 citations92
US5265632ANov 30, 1993
Cleaning apparatus
TOKYO ELECTRON LTD21 citations92
US5319216AJun 7, 1994
Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter
TOKYO ELECTRON LTD52 citations89
US5253663AOct 19, 1993
Transfer apparatus
TOKYO ELECTRON LTD26 citations89
US5226437AJul 13, 1993
Washing apparatus
TOKYO ELECTRON LTD19 citations74
US5505577AApr 9, 1996
Transfer apparatus
TOKYO ELECTRON LTD16 citations73
US5311893AMay 17, 1994
Cleaning apparatus
TOKYO ELECTRON LTD9 citations73
US5248022ASep 28, 1993
Driving device having sealing mechanism
TOKYO ELECTRON LTD8 citations73