Inventor
LAI YU-TSE
TW7 patents
Patents
7 patentsUS12265332B2Apr 1, 2025
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12476145B2Nov 18, 2025
Self-aligned cut-metal layer method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12224237B2Feb 11, 2025
Method of manufacturing a via and a metal wiring for a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12476150B2Nov 18, 2025
Critical dimension uniformity (CDU) control method and semiconductor substrate processing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12386251B2Aug 12, 2025
Method and system to introduce bright field imaging at stitching area of high-NA EUV exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11908731B2Feb 20, 2024
Via-first self-aligned interconnect formation process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US12494366B2Dec 9, 2025
Method of manufacturing semiconductor devices and semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46