Inventor
HARTLAGE ROBERT P
US4 patents
Patents
4 patentsUS5574410ANov 12, 1996
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
APPLIED MATERIALS INC66 citations95
US5392018AFeb 21, 1995
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
APPLIED MATERIALS INC70 citations95
US4927485AMay 22, 1990
Laser interferometer system for monitoring and controlling IC processing
APPLIED MATERIALS INC83 citations94
US5572170ANov 5, 1996
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
APPLIED MATERIALS INC31 citations92