Inventor
SHEL VIKTOR
US8 patents
Patents
8 patentsUS6308654B1Oct 30, 2001
Inductively coupled parallel-plate plasma reactor with a conical dome
APPLIED MATERIALS INC206 citations99
US6252354B1Jun 26, 2001
RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control
APPLIED MATERIALS INC337 citations98
US5790365AAug 4, 1998
Method and apparatus for releasing a workpiece from and electrostatic chuck
APPLIED MATERIALS INC72 citations95
US5585766ADec 17, 1996
Electrically tuned matching networks using adjustable inductance elements
APPLIED MATERIALS INC72 citations95
US5574410ANov 12, 1996
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
APPLIED MATERIALS INC66 citations95
US5392018AFeb 21, 1995
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
APPLIED MATERIALS INC70 citations95
US5572170ANov 5, 1996
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
APPLIED MATERIALS INC31 citations92
US5872456AFeb 16, 1999
Apparatus for directly measuring component values within an RF circuit
APPLIED MATERIALS INC16 citations66