Inventor
RANGELOW IVAYLO W
DE3 patents
Patents
3 patentsUS6136160AOct 24, 2000
Process for producing a carbon film on a substrate
IMS IONEN MIKROFAB SYST72 citations91
US5672449ASep 30, 1997
Silicon membrane and method of making same
IMS IONEN MIKROFAB SYST19 citations82
US6156217ADec 5, 2000
Method for the purpose of producing a stencil mask
IMS IONEN MIKROFAB SYST6 citations60