Inventor
ROE FRED L
US5 patents
Patents
5 patentsUS7049244B2May 23, 2006
Method for enhancing silicon dioxide to silicon nitride selectivity
MICRON TECHNOLOGY INC63 citations97
US5302238AApr 12, 1994
Plasma dry etch to produce atomically sharp asperities useful as cold cathodes
MICRON TECHNOLOGY INC75 citations95
US5302239AApr 12, 1994
Method of making atomically sharp tips useful in scanning probe microscopes
MICRON TECHNOLOGY INC72 citations95
US6287978B1Sep 11, 2001
Method of etching a substrate
MICRON TECHNOLOGY INC20 citations92
US6015760AJan 18, 2000
Method for enhancing oxide to nitride selectivity through the use of independent heat control
MICRON TECHNOLOGY INC20 citations92