Inventor
LEE SING H
US5 patents
⚠️ This page may combine multiple inventors who share the name “LEE SING H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
2 patentsGRAY SCALE TECHNOLOGIES INC
2 patentsUS6534221B2Mar 18, 2003
Method for fabricating continuous space variant attenuating lithography mask for fabrication of devices with three-dimensional structures and microelectronics
GRAY SCALE TECHNOLOGIES INC35 citations87
US6524755B2Feb 25, 2003
Phase-shift masks and methods of fabrication
GRAY SCALE TECHNOLOGIES INC25 citations87