Inventor
MATSUDA IZURU
JP14 patents
Patents
14 patentsUS7513214B2Apr 7, 2009
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD139 citations97
US6340281B1Jan 22, 2002
Method and apparatus for positioning a disk-shaped object
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD23 citations92
US6276892B1Aug 21, 2001
Wafer handling apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92
US6254683B1Jul 3, 2001
Substrate temperature control method and device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD35 citations92
US6808759B1Oct 26, 2004
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations91
US6648976B1Nov 18, 2003
Apparatus and method for plasma processing
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations84
US6255223B1Jul 3, 2001
Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations84
US7292056B2Nov 6, 2007
Membrane with bumps, method of manufacturing the same, and method of testing electrical circuit
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations83
US6642533B2Nov 4, 2003
Substrate detecting method and device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations73
US5514243AMay 7, 1996
Dry etching apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations73
US6864640B2Mar 8, 2005
Plasma processing method and apparatus thereof
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations72
US6447613B1Sep 10, 2002
Substrate dechucking device and substrate dechucking method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations62
US7406925B2Aug 5, 2008
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations61
US6830653B2Dec 14, 2004
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations51