Inventor

CHANG KUN-YUAN

TW3 patents

⚠️ This page may combine multiple inventors who share the name “CHANG KUN-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

2 patents

US6350994B1Feb 26, 2002

Structure of critical dimension bar

UNITED MICROELECTRONICS CORP7 citations70

US6410357B1Jun 25, 2002

Structure of critical dimension bar

UNITED MICROELECTRONICS CORP2 citations59

UNITED MICROELECTRONICS

1 patent

US6586146B2Jul 1, 2003

Method of figuring exposure energy

UNITED MICROELECTRONICS8 citations64