Inventor
PETERSON ANASTASIA OSHELSKI
US12 patents
Patents
12 patentsUS6802045B1Oct 5, 2004
Method and apparatus for incorporating control simulation environment
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US7103439B1Sep 5, 2006
Method and apparatus for initializing tool controllers based on tool event data
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US6785586B1Aug 31, 2004
Method and apparatus for adaptively scheduling tool maintenance
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US6699727B1Mar 2, 2004
Method for prioritizing production lots based on grade estimates and output requirements
ADVANCED MICRO DEVICES INC21 citations92
US6615098B1Sep 2, 2003
Method and apparatus for controlling a tool using a baseline control script
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US6564171B1May 13, 2003
Method and apparatus for parsing event logs to determine tool operability
ADVANCED MICRO DEVICES INC33 citations92
US6937914B1Aug 30, 2005
Method and apparatus for controlling process target values based on manufacturing metrics
ADVANCED MICRO DEVICES INC16 citations84
US6801817B1Oct 5, 2004
Method and apparatus for integrating multiple process controllers
ADVANCED MICRO DEVICES INC14 citations84
US6675058B1Jan 6, 2004
Method and apparatus for controlling the flow of wafers through a process flow
ADVANCED MICRO DEVICES INC14 citations83
US6638778B1Oct 28, 2003
Method for determining, tracking and/or controlling processing based upon silicon characteristics
ADVANCED MICRO DEVICES INC18 citations83
US6970757B1Nov 29, 2005
Method and apparatus for updating control state variables of a process control model based on rework data
ADVANCED MICRO DEVICES INC10 citations74
US6901340B1May 31, 2005
Method and apparatus for distinguishing between sources of process variation
ADVANCED MICRO DEVICES INC11 citations74