Inventor · disambiguated record
Sung-Ming Jang
Also filed as: JANG SUNG-MING
4 granted patents·33 citations·filing 2002–2004
73Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0169US6599838B1Method for forming metal filled semiconductor features to improve a subsequent metal CMP processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 29, 2003·14 cites·20 claims
- 0263US6589852B1Method of replicating alignment marks for semiconductor wafer photolithographyTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 8, 2003·13 cites·20 claims
- 0352US6706637B2Dual damascene aperture formation method absent intermediate etch stop layerTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 16, 2004·6 cites·16 claims
- 0440US7176135B2EBR shape of spin-on low-k material providing good film stackingTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Feb 13, 2007·0 cites·25 claims
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