Inventor
CHEN SHUN LONG
TW7 patents
Patents
7 patentsUS6560862B1May 13, 2003
Modified pad for copper/low-k
TAIWAN SEMICONDUCTOR MFG65 citations94
US6518166B1Feb 11, 2003
Liquid phase deposition of a silicon oxide layer for use as a liner on the surface of a dual damascene opening in a low dielectric constant layer
TAIWAN SEMICONDUCTOR MFG41 citations91
US6818533B2Nov 16, 2004
Epitaxial plasma enhanced chemical vapor deposition (PECVD) method providing epitaxial layer with attenuated defects
TAIWAN SEMICONDUCTOR MFG25 citations86
US5701174ADec 23, 1997
Template mask for assisting in optical inspection of oxidation induced stacking fault (OISF)
TAIWAN SEMICONDUCTOR MFG5 citations71
US6730580B2May 4, 2004
Silicon substrate wafer fabrication method employing halogen gettering material and/or plasma annealing
TAIWAN SEMICONDUCTOR MFG7 citations68
US5933229AAug 3, 1999
Template mask for assisting in optical inspection of oxidation induced stacking fault (OISF)
TAIWAN SEMICONDUCTOR MFG3 citations60
US5746876AMay 5, 1998
Safety sampler for hot acid in semiconductor manufacturing fab
TAIWAN SEMICONDUCTOR MFG2 citations52