Inventor
SONG DOO GUEN
KR3 patents
Patents
3 patentsUS6800863B2Oct 5, 2004
Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same
SAMSUNG ELECTRONICS CO LTD6 citations59
US6867055B2Mar 15, 2005
Method of testing ion implantation energy in ion implantation equipment
SAMSUNG ELECTRONICS CO LTD2 citations54
US7112810B2Sep 26, 2006
Ion implanting apparatus and ion implanting method using the same
SAMSUNG ELECTRONICS CO LTD1 citations47