P
PatentIndex
Search
Landscape
Sign in
Inventor
MOLONEY GERARD
US
3 patents
⚠️ This page may combine multiple inventors who share the name “MOLONEY GERARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA TECH INC
2 patents
US7326103B2
Feb 5, 2008
Vertically adjustable chemical mechanical polishing head and method for use thereof
EBARA TECH INC
20 citations
90
US7125326B2
Oct 24, 2006
Apparatus and method for removing a CMP polishing pad from a platen
EBARA TECH INC
10 citations
67
MULTI PLANAR TECHNOLOGIES INC
1 patent
US6887132B2
May 3, 2005
Slurry distributor for chemical mechanical polishing apparatus and method of using the same
MULTI PLANAR TECHNOLOGIES INC
44 citations
89