Inventor

WALSH CORMAC

US2 patents

⚠️ This page may combine multiple inventors who share the name “WALSH CORMAC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MULTI PLANAR TECHNOLOGIES INC

1 patent

US6887132B2May 3, 2005

Slurry distributor for chemical mechanical polishing apparatus and method of using the same

MULTI PLANAR TECHNOLOGIES INC44 citations89

EBARA TECH INC

1 patent

US7125326B2Oct 24, 2006

Apparatus and method for removing a CMP polishing pad from a platen

EBARA TECH INC10 citations67