Inventor
REYES ALEJANDRO
US5 patents
Patents
5 patentsUS6558232B1May 6, 2003
System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control
MULTI PLANAR TECHNOLOGIES INC92 citations96
US6506105B1Jan 14, 2003
System and method for pneumatic diaphragm CMP head having separate retaining ring and multi-region wafer pressure control
MULTI PLANAR TECHNOLOGIES INC105 citations96
US6966822B2Nov 22, 2005
System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control
MULTI PLANAR TECHNOLOGIES INC18 citations91
US6623343B2Sep 23, 2003
System and method for CMP head having multi-pressure annular zone subcarrier material removal control
MULTI PLANAR TECHNOLOGIES INC51 citations91
US6887132B2May 3, 2005
Slurry distributor for chemical mechanical polishing apparatus and method of using the same
MULTI PLANAR TECHNOLOGIES INC44 citations89