Inventor
NAKAMURA NATSUKO
JP3 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA NATSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JEOL LTD
2 patentsUS7060986B2Jun 13, 2006
Automated method of correcting aberrations in electron beam, method of visualizing aberrations, and automated aberration corrector
JEOL LTD20 citations80
US7355175B2Apr 8, 2008
Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam
JEOL LTD8 citations71