Inventor
LEE BYUNG-SUG
KR4 patents
Patents
4 patentsUS7446865B2Nov 4, 2008
Method of classifying defects
SAMSUNG ELECTRONICS CO LTD3 citations61
US7486392B2Feb 3, 2009
Method of inspecting for defects and apparatus for performing the method
SAMSUNG ELECTRONICS CO LTD6 citations60
US7385689B2Jun 10, 2008
Method and apparatus for inspecting substrate pattern
SAMSUNG ELECTRONICS CO LTD5 citations60
US7394279B2Jul 1, 2008
Method of measuring a surface voltage of an insulating layer
SAMSUNG ELECTRONICS CO LTD4 citations57