Inventor
HEERTJES MARCEL FRANCOIS
NL10 patents
⚠️ This page may combine multiple inventors who share the name “HEERTJES MARCEL FRANCOIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7817243B2Oct 19, 2010
Vibration isolation system
ASML NETHERLANDS BV13 citations83
US7818073B2Oct 19, 2010
Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method
ASML NETHERLANDS BV10 citations81
US8014881B2Sep 6, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations57
US7453228B2Nov 18, 2008
Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
ASML NETHERLANDS BV2 citations56
US8373849B2Feb 12, 2013
Lithographic apparatus and control system
ASML NETHERLANDS BV1 citations49
US7774287B2Aug 10, 2010
System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
HEERTJES MARCEL FRANCOIS
3 patentsUS8135488B2Mar 13, 2012
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
HEERTJES MARCEL FRANCOIS2 citations54
US8675179B2Mar 18, 2014
Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable object
HEERTJES MARCEL FRANCOIS2 citations50
US8452442B2May 28, 2013
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
HEERTJES MARCEL FRANCOIS0 citations44