Inventor

HOUBEN DENNIS ANDREAS PETRUS HUBERTINA

NL3 patents

⚠️ This page may combine multiple inventors who share the name “HOUBEN DENNIS ANDREAS PETRUS HUBERTINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HEERTJES MARCEL FRANCOIS

2 patents

US8135488B2Mar 13, 2012

Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

HEERTJES MARCEL FRANCOIS2 citations54

US8452442B2May 28, 2013

Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

HEERTJES MARCEL FRANCOIS0 citations44

ASML NETHERLANDS BV

1 patent

US8014881B2Sep 6, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations57