Inventor
GOOSSENS JEFFREY HENDRIKUS PETER MARIA
NL2 patents
Patents
2 patentsUS8135488B2Mar 13, 2012
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
HEERTJES MARCEL FRANCOIS2 citations54
US8452442B2May 28, 2013
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
HEERTJES MARCEL FRANCOIS0 citations44