Inventor
YONEDA AKIHIKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YONEDA AKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
4 patentsUS7494941B2Feb 24, 2009
Manufacturing method of semiconductor device, and substrate processing apparatus
HITACHI INT ELECTRIC INC46 citations91
US10290516B2May 14, 2019
Substrate processing apparatus, maintenance method, and maintenance program
HITACHI INT ELECTRIC INC1 citations60
US10295991B2May 21, 2019
Substrate processing apparatus and recording medium
HITACHI INT ELECTRIC INC1 citations59
US7808396B2Oct 5, 2010
Substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations48