Inventor

INOSHIMA KAORI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “INOSHIMA KAORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

4 patents

US10131992B2Nov 20, 2018

Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations68

US10096501B2Oct 9, 2018

Maintenance method of substrate processing apparatus, method for manufacturing semiconductor device, substrate processing apparatus, and storage medium capable of reading maintenance program of substrate processing apparatus

HITACHI INT ELECTRIC INC3 citations67

US7808396B2Oct 5, 2010

Substrate processing apparatus

HITACHI INT ELECTRIC INC1 citations48

US9690879B2Jun 27, 2017

Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe

HITACHI INT ELECTRIC INC0 citations36

IIDA TSUKASA

1 patent

US8482426B2Jul 9, 2013

Substrate processing apparatus

IIDA TSUKASA0 citations41