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Inventor
CHAE HWANKOOK
KR
4 patents
⚠️ This page may combine multiple inventors who share the name “CHAE HWANKOOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIM MINSHIK
1 patent
US8652296B2
Feb 18, 2014
Side gas injector for plasma reaction chamber
KIM MINSHIK
5 citations
62
PARK KUNJOO
1 patent
US8158068B2
Apr 17, 2012
Plasma reactor
PARK KUNJOO
5 citations
51
CHAE HWANKOOK
1 patent
US8815047B2
Aug 26, 2014
Plasma chemical reactor
CHAE HWANKOOK
2 citations
49
JANG HYEOKJIN
1 patent
US8323522B2
Dec 4, 2012
Plasma reactor and etching method using the same
JANG HYEOKJIN
1 citations
39