Inventor
RIJS ROBERTUS MATHIJS GERARDUS
NL9 patents
⚠️ This page may combine multiple inventors who share the name “RIJS ROBERTUS MATHIJS GERARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS10191396B2Jan 29, 2019
Lithographic apparatus, object positioning system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US9946172B2Apr 17, 2018
System for positioning an object in lithography
ASML NETHERLANDS BV2 citations71
US9726985B2Aug 8, 2017
Stage system and a lithographic apparatus
ASML NETHERLANDS BV4 citations71
US10114299B2Oct 30, 2018
Lithographic apparatus
ASML NETHERLANDS BV0 citations46
US10545414B2Jan 28, 2020
Vibration isolation system and lithographic apparatus
ASML NETHERLANDS BV0 citations41
VERVOORDELDONK MICHAEL JOHANNES
2 patentsUS8091694B2Jan 10, 2012
Actuator arrangement for active vibration isolation comprising an inertial reference mass
VERVOORDELDONK MICHAEL JOHANNES8 citations81
US8915340B2Dec 23, 2014
Actuator arrangement for active vibration isolation comprising an inertial reference mass
VERVOORDELDONK MICHAEL JOHANNES1 citations44