Inventor
KO WOO-SEOK
KR15 patents
⚠️ This page may combine multiple inventors who share the name “KO WOO-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
12 patentsUS9934939B2Apr 3, 2018
Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof
SAMSUNG ELECTRONICS CO LTD5 citations72
US9831626B2Nov 28, 2017
Broadband light source and optical inspector having the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US9733178B2Aug 15, 2017
Spectral ellipsometry measurement and data analysis device and related systems and methods
SAMSUNG ELECTRONICS CO LTD3 citations72
US8841824B2Sep 23, 2014
Broadband light illuminators
SAMSUNG ELECTRONICS CO LTD5 citations71
US10001444B2Jun 19, 2018
Surface inspecting method
SAMSUNG ELECTRONICS CO LTD4 citations70
US10373796B2Aug 6, 2019
Method of inspecting wafer using electron beam
SAMSUNG ELECTRONICS CO LTD2 citations68
US9123503B2Sep 1, 2015
Methods of fabricating microelectronic substrate inspection equipment
SAMSUNG ELECTRONICS CO LTD3 citations62
US7697130B2Apr 13, 2010
Apparatus and method for inspecting a surface of a wafer
SAMSUNG ELECTRONICS CO LTD3 citations61
US8034641B2Oct 11, 2011
Method for inspection of defects on a substrate
SAMSUNG ELECTRONICS CO LTD5 citations60
US9261532B1Feb 16, 2016
Conductive atomic force microscope and method of operating the same
SAMSUNG ELECTRONICS CO LTD2 citations57
US9255694B2Feb 9, 2016
Reflector structure of illumination optic system
SAMSUNG ELECTRONICS CO LTD0 citations50
US9417055B2Aug 16, 2016
Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film
SAMSUNG ELECTRONICS CO LTD0 citations48