Inventor · disambiguated record
Hyung-Su Son
Also filed as: SON HYUNG-SU
4 granted patents·7 citations·filing 2010–2019
64Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0179US8034641B2Method for inspection of defects on a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2010·Granted Oct 11, 2011·5 cites·20 claims
- 0277US9261532B1Conductive atomic force microscope and method of operating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Feb 16, 2016·2 cites·20 claims
- 0357US11004754B2X-ray topographic apparatus and substrate processing system using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted May 11, 2021·0 cites·20 claims
- 0453US10504804B2Laser processing method, substrate dicing method and substrate processing system for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Dec 10, 2019·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →