Inventor
IVANOV VLADIMIR VITALEVICH
RU16 patents
⚠️ This page may combine multiple inventors who share the name “IVANOV VLADIMIR VITALEVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7763871B2Jul 27, 2010
Radiation source
ASML NETHERLANDS BV2 citations62
US8368040B2Feb 5, 2013
Radiation system and lithographic apparatus
ASML NETHERLANDS BV4 citations61
US9363879B2Jun 7, 2016
Module and method for producing extreme ultraviolet radiation
ASML NETHERLANDS BV0 citations51
US7772570B2Aug 10, 2010
Assembly for blocking a beam of radiation and method of blocking a beam of radiation
ASML NETHERLANDS BV0 citations51
US7872244B2Jan 18, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US7825390B2Nov 2, 2010
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
ASML NETHERLANDS BV0 citations45