Inventor
HIURA MITSURU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “HIURA MITSURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
9 patentsUS7274435B2Sep 25, 2007
Exposure apparatus and device fabrication method using the same
CANON KK20 citations92
US6891175B2May 10, 2005
Exposure apparatus and device manufacturing method using the same
CANON KK46 citations91
US9442370B2Sep 13, 2016
Imprinting method, imprinting apparatus, and device manufacturing method
CANON KK3 citations72
US9851634B2Dec 26, 2017
Imprint apparatus
CANON KK3 citations70
US7295285B2Nov 13, 2007
Exposure apparatus and device manufacturing method
CANON KK5 citations61
US10073339B2Sep 11, 2018
Imprint apparatus
CANON KK1 citations51
US9910351B2Mar 6, 2018
Imprint apparatus and article manufacturing method
CANON KK0 citations51
US9616613B2Apr 11, 2017
Imprint apparatus including alignment and overlay measurement
CANON KK1 citations51
US9541825B2Jan 10, 2017
Imprint apparatus and article manufacturing method
CANON KK1 citations51