Inventor

SAUTER VAN NESS DANA

US3 patents

Patents

3 patents

US9505952B2Nov 29, 2016

Polishing composition containing ceria abrasive

CABOT MICROELECTRONICS CORP14 citations80

US9828528B2Nov 28, 2017

Polishing composition containing ceria abrasive

CABOT MICROELECTRONICS CORP0 citations48

US9758697B2Sep 12, 2017

Polishing composition containing cationic polymer additive

CABOT MICROELECTRONICS CORP0 citations38