Inventor
LAM VIET
US11 patents
Patents
11 patentsUS9505952B2Nov 29, 2016
Polishing composition containing ceria abrasive
CABOT MICROELECTRONICS CORP14 citations80
US10920107B2Feb 16, 2021
Self-stopping polishing composition and method for bulk oxide planarization
CABOT MICROELECTRONICS CORP2 citations69
US10619076B2Apr 14, 2020
Self-stopping polishing composition and method for bulk oxide planarization
CABOT MICROELECTRONICS CORP2 citations69
US10619075B2Apr 14, 2020
Self-stopping polishing composition and method for bulk oxide planarization
CABOT MICROELECTRONICS CORP1 citations59
US10639766B2May 5, 2020
Methods and compositions for processing dielectric substrate
CABOT MICROELECTRONICS CORP0 citations51
US10029345B2Jul 24, 2018
Methods and compositions for processing dielectric substrate
CABOT MICROELECTRONICS CORP0 citations51
US10414947B2Sep 17, 2019
Polishing composition containing ceria particles and method of use
CABOT MICROELECTRONICS CORP0 citations50
US10301508B2May 28, 2019
Polishing composition comprising cationic polymer additive
CABOT MICROELECTRONICS CORP0 citations49
US9828528B2Nov 28, 2017
Polishing composition containing ceria abrasive
CABOT MICROELECTRONICS CORP0 citations48
US9758697B2Sep 12, 2017
Polishing composition containing cationic polymer additive
CABOT MICROELECTRONICS CORP0 citations38
US9340706B2May 17, 2016
Mixed abrasive polishing compositions
CABOT MICROELECTRONICS CORP0 citations36