Inventor

HAINS ALEXANDER

US2 patents

Patents

2 patents

US9505952B2Nov 29, 2016

Polishing composition containing ceria abrasive

CABOT MICROELECTRONICS CORP14 citations80

US9828528B2Nov 28, 2017

Polishing composition containing ceria abrasive

CABOT MICROELECTRONICS CORP0 citations48