Inventor

JINNAI BUTSURIN

US2 patents

⚠️ This page may combine multiple inventors who share the name “JINNAI BUTSURIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GUHA JOYDEEP

1 patent

US8784676B2Jul 22, 2014

Waferless auto conditioning

GUHA JOYDEEP278 citations94

LAM RES CORP

1 patent

US9899227B2Feb 20, 2018

System, method and apparatus for ion milling in a plasma etch chamber

LAM RES CORP0 citations39